Patents/Inventors

Peter Thaulad

Fremont, CAUS2 patents

3 Patents

US124890062025
Auto-calibration to a Station of a Process Module That Spins a Wafer
Lam Research Corporation
0 cites
US121683012024
Fixture for Automatic Calibration of Substrate Transfer Robot
LAM RESEARCH CORPORATION
0 cites
US117422292023
Auto-calibration to a Station of a Process Module That Spins a Wafer
Lam Research Corporation
0 cites