Patents/Inventors

Peter Sebald Lauffer

AachenDE9 patents

7 Patents

US125842222026
Methods for Thermal Treatment of Substrates
AIXTRON SE
0 cites
US125776702026
CVD Reactor Having Means for Locally Influencing the Susceptor Temperature
AIXTRON SE
0 cites
US124354222025
Method for Recording a State of a CVD Reactor Under Production Conditions
AIXTRON SE
0 cites
US123593192025
Arrangement for Measuring the Surface Temperature of a Susceptor in a CVD Reactor
AIXTRON SE
0 cites
US123052822025
Susceptor of a CVD Reactor
AIXTRON SE
0 cites
US117135052023
Device and Method for Controlling the Ceiling Temperature of a CVD Reactor
AIXTRON SE
0 cites
US116690722023
Device and Method for Obtaining Information About Layers Deposited in a CVD Method
AIXTRON SE
0 cites