17 Patents
- US125899882026Production Method for a Micromechanical Component for a Sensor Device or Microphone Device
ROBERT BOSCH GmbH
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- US122304572025Method for Manufacturing a MEMS Switch Having an Embedded Metal Contact
ROBERT BOSCH GmbH
0 cites - US121638512024Micromechanical Component for a Sensor Device Having a Capacitor Sealing Structure
ROBERT BOSCH GmbH
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- US119786582024Method for Manufacturing a Polysilicon SOI Substrate Including a Cavity
ROBERT BOSCH GmbH
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- US119125632024Micromechanical Component and Method for Manufacturing a Micromechanical Component
ROBERT BOSCH GmbH
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- US117889122023Micromechanical Pressure Sensor Device Including a Diaphragm System and Corresponding Manufacturing Method
ROBERT BOSCH GmbH
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