Peter Paul Hempenius

3 Patents

• US117987772023

  Charged Particle Beam Apparatus, and Systems and Methods for Operating the Apparatus

  ASML Netherlands B.V.

  0 cites
• US117640302023

  Stage Apparatus Suitable for Electron Beam Inspection Apparatus

  ASML Netherlands B.V.

  0 cites
• US116211422023

  Substrate Positioning Device and Electron Beam Inspection Tool

  ASML Netherlands B.V.

  0 cites