Peter Paul

5 Patents

• US123621462025

  Adaptive Pulse Shaping with Post Match Sensor

  MKS Inc.

  0 cites
• US122780902025

  Enhanced Tuning Methods for Mitigating RF Load Impedance Variations Due to Periodic Disturbances

  MKS Instruments, Inc.

  0 cites
• US121835492024

  Apparatus and Tuning Method for Mitigating RF Load Impedance Variations Due to Periodic Disturbances

  MKS Instruments, Inc.

  0 cites
• US119962742024

  Real-time, Non-invasive IEDF Plasma Sensor

  MKS Instruments, Inc.

  0 cites
• US117156242023

  Adaptive Pulse Shaping with Post Match Sensor

  MKS Instruments, Inc.

  0 cites