22 Patents
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- US125312052026Equipment and Method for Improved Edge Uniformity of Plasma Processing of Wafers
Tokyo Electron Limited
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- US124513292025Plasma Processing Apparatus with Tunable Electrical Characteristic
TOKYO ELECTRON LIMITED
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- US122179352025Plasma Processing Methods Using Multiphase Multifrequency Bias Pulses
Tokyo Electron Limited
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- US119423072024Plasma Processing with Radio Frequency (RF) Source and Bias Signal Waveforms
Tokyo Electron Limited
0 cites - US117734842023Hard Mask Deposition Using Direct Current Superimposed Radio Frequency Plasma
TOKYO ELECTRON LIMITED
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