Peter Fernand William Jozef Dendas

2 Patents

• US126191702026

  Projection Unit for a Level Sensor, Method of Monitoring Height of a Substrate, and Lithographic System Comprising the Projection Unit

  ASML NETHERLANDS B.V.

  0 cites
• US125353142026

  System and Method for Generating Level Data for a Surface of a Substrate

  ASML Netherlands B.V.

  0 cites