13 Patents
- 0 cites
- US125735792026Hybrid Apparatus, System and Techniques for Mass Analyzed Ion Beam
Applied Materials, Inc.
0 cites - US122494882025Plasma Shaper to Control Ion Flux Distribution of Plasma Source
Applied Materials, Inc.
0 cites - US121911562025Ribbon Beam Plasma Enhanced Chemical Vapor Deposition System for Anisotropic Deposition of Thin Films
Applied Materials, Inc.
0 cites - 0 cites
- US121069362024Scanned Angled Etching Apparatus and Techniques Providing Separate Co-linear Radicals and Ions
Applied Materials, Inc.
0 cites - US119962662024Apparatus and Techniques for Substrate Processing Using Independent Ion Source and Radical Source
Applied Materials, Inc.
0 cites - US119674892024Apparatus and Techniques for Angled Etching Using Multielectrode Extraction Source
Applied Materials, Inc.
0 cites - 0 cites
- US118624332024System and Methods Using an Inline Surface Engineering Source
Varlan Semiconductor Equipment Associates, Inc.
0 cites - 0 cites
- US117156212023Scanned Angled Etching Apparatus and Techniques Providing Separate Co-linear Radicals and Ions
APPLIED Materials, Inc.
0 cites - 0 cites