Pekka Soininen

13 Patents

• US125903672026

  Precursor Supply Chamber

  BENEQ OY

  0 cites
• US124602922025

  Atomic Layer Deposition Apparatus and a Method

  BENEQ OY

  0 cites
• US124420812025

  Nozzle Head and Apparatus

  BENEQ OY

  0 cites
• US121805872024

  Vacuum Chamber and Arrangement for Atomic Layer Deposition

  BENEQ OY

  0 cites
• US121805882024

  Loading Device, Arrangement and Method for Loading a Reaction Chamber

  BENEQ OY

  0 cites
• US121166682024

  Atomic Layer Deposition Reactor Arrangement and a Method for Operating an Atomic Layer Deposition Reactor Arrangement

  BENEQ OY

  0 cites
• US121042482024

  Gas Feeding Cup and a Gas Manifold Assembly

  BENEQ OY

  0 cites
• US120000432024

  Precursor Source Arrangement and Atomic Layer Deposition Apparatus

  BENEQ OY

  0 cites
• US119707732024

  Apparatus and Method for Atomic Layer Deposition (ALD)

  BENEQ OY

  0 cites
• US119268962024

  Atomic Layer Deposition Apparatus

  BENEQ OY

  0 cites
• US117027452023

  Nozzle and Nozzle Head

  BENEQ OY

  0 cites
• US116348142023

  Atomic Layer Deposition Apparatus

  BENEQ GROUP OY

  0 cites
• US115497022023

  Precursor Supply Cabinet

  BENEQ OY

  0 cites