6 Patents
- US125640012026Dual Pyrometer Systems for Substrate Temperature Control During Film Deposition
ASM IP Holding B.V.
0 cites - US123786652025High Temperature Coatings for a Preclean and Etch Apparatus and Related Methods
ASM IP Holding B.V.
0 cites - US123548932025Fixture and Method for Determining Position of a Target in a Reaction Chamber
ASM IP Holding B.V.
0 cites - 0 cites
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- US120065722024Reactor System Including a Gas Distribution Assembly for Use with Activated Species and Method of Using Same
ASM IP Holding B.V.
0 cites