Patents/Inventors

Pei-sheng Tang

TaipeiTW5 patents

5 Patents

US125819162026
Etch Monitoring and Performing
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123745882025
Method for Evaluating Non-uniform Stress
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US121208862024
Memory Device and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118044102023
Thin-film Non-uniform Stress Evaluation
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US117495702023
Etch Monitoring and Performing
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites