Paul Z. Wirth

5 Patents

• US121306062024

  Disturbance Compensation for Substrate Processing Recipes

  Applied Materials, Inc.

  0 cites
• US118374782023

  Temperature-controllable Process Chambers, Electronic Device Processing Systems, and Manufacturing Methods

  Applied Materials, Inc.

  0 cites
• US117911722023

  Methods of Controlling Gas Pressure in Gas-pulsing-based Precursor Distribution Systems

  APPLIED MATERIALS, Inc.

  0 cites
• US115906622023

  Robot for Simultaneous Substrate Transfer

  Applied Materials, Inc.

  0 cites
• US115823782023

  Methods and Apparatus for Absolute and Relative Depth Measurements Using Camera Focus Distance

  Applied Materials, Inc.

  0 cites