Patents/Inventors

Paul L. Brillhart

Pleasanton, CAUS5 patents

6 Patents

US126069122026
High Heat Loss Heater and Electrostatic Chuck for Semiconductor Processing
Applied Materials, Inc.
0 cites
US123004742025
Semiconductor Substrate Support Power Transmission Components
Applied Materials, Inc.
0 cites
US121319342024
Semiconductor Substrate Support Leveling Apparatus
Applied Materials, Inc.
0 cites
US120625672024
Systems and Methods for Substrate Support Temperature Control
APPLIED MATERIALS, Inc.
0 cites
US120573392024
Bipolar Electrostatic Chuck to Limit DC Discharge
Applied Materials, Inc.
0 cites
US120402102024
Multi-pressure Bipolar Electrostatic Chucking
Applied Materials, Inc.
0 cites