Patents/Inventors

Paul Konkola

West Linn, ORUS6 patents

7 Patents

US124890062025
Auto-calibration to a Station of a Process Module That Spins a Wafer
Lam Research Corporation
0 cites
US123946012025
Impedance Transformation in Radio-frequency-assisted Plasma Generation
Lam Research Corporation
0 cites
US122665092025
Multilayer Coatings of Component Parts for a Work Piece Processing Chamber
LAM RESEARH CORPORATION
0 cites
US121868512025
Use of Vacuum During Transfer of Substrates
Lam Research Corporation
0 cites
US119842982024
Impedance Transformation in Radio-frequency-assisted Plasma Generation
Lam Research Corporation
0 cites
US119553662024
Pad Raising Mechanism in Wafer Positioning Pedestal for Semiconductor Processing
Lam Research Corporation
0 cites
US117422292023
Auto-calibration to a Station of a Process Module That Spins a Wafer
Lam Research Corporation
0 cites