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Inventors
Paul Janssen
Eindhoven
NL
9 patents
9 Patents
US12474629
2025
Membrane for EUV Lithography
ASML NETHERLANDS B.V.
0 cites
US12436454
2025
Pellicle Membrane
ASML NETHERLANDS B.V.
0 cites
US12117726
2024
Pellicle and Pellicle Assembly
ASML NETHERLANDS B.V.
0 cites
US12066758
2024
Pellicle and Pellicle Assembly
ASML HOLDING N.V.
0 cites
US12001135
2024
Method of Manufacturing a Membrane Assembly
ASML NETHERLANDS B.V.
0 cites
US11977326
2024
Pellicle for EUV Lithography
ASML NETHERLANDS B.V.
0 cites
US11762281
2023
Membrane for EUV Lithography
ASML NETHERLANDS B.V.
0 cites
US11754918
2023
Pellicle and Pellicle Assembly
ASML NETHERLANDS B.V.
0 cites
US11635681
2023
Mask Assembly and Associated Methods
ASML Netherlands B.V.
0 cites