17 Patents
- US125686512026Semiconductor Structure Having Stacked Gates and Method of Manufacture Thereof
Tokyo Electron Limited
0 cites - US125573772026Inverted Cross-couple for Top-tier FET for Multi-tier Gate-on-gate 3DI
Tokyo Electron Limited
0 cites - US124462912025Inverted Top-tier FET for Multi-tier Gate-on-gate 3-dimension Integration (3di)
TOKYO ELECTRON LIMITED
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- US123362742025Self-aligned Method for Vertical Recess for 3D Device Integration
Tokyo Electron Limited
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- US121762932024Inter-tier Power Delivery Network (PDN) for Dense Gate-on-gate 3D Logic Integration
TOKYO ELECTRON LIMITED
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- US119618022024Power-tap Pass-through to Connect a Buried Power Rail to Front-side Power Distribution Network
Tokyo Electron Limited
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- US118308522023Multi-tier Backside Power Delivery Network for Dense Gate-on-gate 3D Logic
TOKYO ELECTRON LIMITED
0 cites - US117641132023Method of 3D Logic Fabrication to Sequentially Decrease Processing Temperature and Maintain Material Thermal Thresholds
Tokyo Electron Limited
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