Patents/Inventors

Paul D. Butterfield

San Jose, CAUS9 patents

10 Patents

US124590112025
Steam Treatment Stations for Chemical Mechanical Polishing System
Applied Materials, Inc.
0 cites
US123924272025
Insulated Fluid Lines in Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US120300932024
Steam Treatment Stations for Chemical Mechanical Polishing System
Applied Materials, Inc.
0 cites
US119869262024
Slurry Distribution Device for Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US118336372023
Control of Steam Generation for Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US118068352023
Slurry Distribution Device for Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US118015822023
Control of Steam Generation for Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US117800462023
Polishing System with Annular Platen or Polishing Pad
Applied Materials, Inc.
0 cites
US116338332023
Use of Steam for Pre-heating of CMP Components
Applied Materials, Inc.
0 cites
US116284782023
Steam Cleaning of CMP Components
Applied Materials, Inc.
0 cites