Patents/Inventors

Paul Christiaan Hinnen

VeldhovenNL9 patents

10 Patents

US124682342025
Method of Controlling a Patterning Process, Device Manufacturing Method
ASML NETHERLANDS B.V.
0 cites
US124682352025
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US123226602025
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US121425352024
Method and Apparatus to Determine a Patterning Process Parameter Using a Unit Cell Having Geometric Symmetry
ASML NETHERLANDS B.V.
0 cites
US119472692024
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US117840982023
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US117336102023
Method and System to Monitor a Process Apparatus
ASML NETHERLANDS B.V.
0 cites
US117282242023
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US117106682023
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US116044192023
Method of Determining Information About a Patterning Process, Method of Reducing Error in Measurement Data, Method of Calibrating a Metrology Process, Method of Selecting Metrology Targets
ASML NETHERLANDS B.V.
0 cites