16 Patents
- US125893452026Filter Isolation for Reduced Startup Time in Low Relative Humidity Equipment Front End Module
Applied Materials, Inc.
0 cites - US121597962024Systems and Methods for Integrating Load Locks Into a Factory Interface Footprint Space
Applied Materials, Inc.
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- US120947152024Abatement and Strip Process Chamber in a Load Lock Configuration
APPLIED MATERIALS, Inc.
0 cites - US120768542024Increased Number of Load Ports on Factory Interface with Robot That Moves on Track
Applied Materials, Inc.
0 cites - 0 cites
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- US117911852023Side Storage Pods, Electronic Device Processing Systems, and Methods for Operating the Same
Applied Materials, Inc.
0 cites - US117495372023Side Storage Pods, Equipment Front End Modules, and Methods for Operating Equipment Front End Modules
Applied Materials, Inc.
0 cites - US116409152023Side Storage Pods, Equipment Front End Modules, and Methods for Operating Efems
Applied Materials, Inc.
0 cites - US116370292023Load Port Operation in Electronic Device Manufacturing Apparatus, Systems, and Methods
Applied Materials, Inc.
0 cites - US115812032023Systems for Integrating Load Locks Into a Factory Interface Footprint Space
Applied Materials, Inc.
0 cites - US115748312023Method and Apparatus for Substrate Transfer and Radical Confinement
Applied Materials, Inc.
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