Patents/Inventors

Paul Abel

Austin, TXUS10 patents

12 Patents

US124943752025
Method to Selectively Etch Silicon Nitride to Silicon Oxide Using Surface Alkylation
Tokyo Electron Limited
0 cites
US124630502025
Methods for Wet Atomic Layer Etching of Molybdenum
Tokyo Electron Limited
0 cites
US124446062025
Methods for Forming Vertically Layered Ionic Liquid Crystal (ILC) Structures on a Semiconductor Substrate
Tokyo Electron Limited
0 cites
US124446102025
Methods for Etching a Substrate Using a Hybrid Wet Atomic Layer Etching Process
Tokyo Electron Limited
0 cites
US122760332025
Methods for Wet Etching of Noble Metals
Tokyo Electron Limited
0 cites
US122437522025
Systems for Etching a Substrate Using a Hybrid Wet Atomic Layer Etching Process
Tokyo Electron Limited
0 cites
US122371662025
Methods for Selective Removal of Surface Oxides on Metal Films
Tokyo Electron Limited
0 cites
US120375172024
Ruthenium CMP Chemistry Based on Halogenation
Tokyo Electron Limited
0 cites
US119159412024
Dynamically Adjusted Purge Timing in Wet Atomic Layer Etching
Tokyo Electron Limited
0 cites
US118668312024
Methods for Wet Atomic Layer Etching of Copper
Tokyo Electron Limited
0 cites
US118209192023
Ruthenium CMP Chemistry Based on Halogenation
Tokyo Electron Limited
0 cites
US118023422023
Methods for Wet Atomic Layer Etching of Ruthenium
Tokyo Electron Limited
0 cites