Patents/Inventors

Patrick G. Breiling

Tigard, ORUS2 patents

3 Patents

US123851382025
Plasma-enhanced Deposition of Film Stacks
Novellus Systems, Inc.
0 cites
US121425092024
Electrostatic Chuck with Seal Surface
Lam Research Corporation
0 cites
US118374432023
Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression
Lam Research Corporation
0 cites