12 Patents
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- US124746402025Integration of Dry Development and Etch Processes for EUV Patterning in a Single Process Chamber
Lam Research Corporation
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- US120515892024Tin Oxide Thin Film Spacers in Semiconductor Device Manufacturing
Lam Research Corporation
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- US117840472023Tin Oxide Thin Film Spacers in Semiconductor Device Manufacturing
Lam Research Corporation
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