Patricio E. Romero

2 Patents

• US123446272025

  Scandium Precursor for SC 2 O 3 or SC 2 S 3 Atomic Layer Deposition

  Intel Corporation

  0 cites
• US118664532024

  Scandium Precursor for SC 2 O 3 or SC 2 S 3 Atomic Layer Deposition

  Intel Corporation

  0 cites