Patricia M. Liu

9 Patents

• US124493092025

  Methods for Detection Using Optical Emission Spectroscopy

  Applied Materials, Inc.

  0 cites
• US122496262025

  Arsenic Diffusion Profile Engineering for Transistors

  Applied Materials, Inc.

  0 cites
• US122278472025

  Level Monitoring and Active Adjustment of a Substrate Support Assembly

  Applied Materials, Inc.

  0 cites
• US121966172025

  Temperature Profile Measurement and Synchronized Control on Substrate and Susceptor in an Epitaxy Chamber

  Applied Materials, Inc.

  0 cites
• US121659342024

  Substrate Processing Monitoring

  Applied Materials, Inc.

  0 cites
• US119011822024

  Silicide Film Nucleation

  APPLIED MATERIALS, Inc.

  0 cites
• US118609732024

  Method and System for Foreline Deposition Diagnostics and Control

  Applied Materials, Inc.

  0 cites
• US117330812023

  Methods, Systems, and Apparatus for Conducting a Calibration Operation for a Plurality of Mass Flow Controllers (mfcs) of a Substrate Processing System

  Applied Materials, Inc.

  0 cites
• US116159862023

  Methods and Apparatus for Metal Silicide Deposition

  APPLIED MATERIALS, Inc.

  0 cites