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Inventors
Panu Koppinen
Espoo
FI
4 patents
5 Patents
US12209942
2025
Particle Sensor
Teknologian Tutkimuskeskus VTT Oy
0 cites
US12212300
2025
MEMS Resonator with High Quality Factor and Its Use
KYOCERA TECHNOLOGIES OY
0 cites
US12184262
2024
MEMS Resonator
KYOCERA TECHNOLOGIES OY
0 cites
US11913859
2024
Trapping and Releasing Particles Carried by Gas Sample
Teknologian Tutkimuskeskus VTT Oy
0 cites
US11799441
2023
MEMS Resonator
KYOCERA Tikitin Oy
0 cites