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Inventors
Ottmar Hoinkis
Darmstadt
DE
2 patents
2 Patents
US12586755
2026
Apparatus for Analyzing And/or Processing a Sample with a Particle Beam and Method
Carl Zeiss SMT GmbH
0 cites
US11961705
2024
Method and Apparatus for Examining a Beam of Charged Particles
Carl Zeiss SMT GmbH
0 cites