Patents/Inventors

Osamu Wakabayashi

OyamaJP27 patents

23 Patents

US125738172026
Exposure System, Exposure Method, and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US125138082025
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US124383332025
Line Narrowing Gas Laser Device, Wavelength Control Method, and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US124068892025
Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US123895082025
Light Source Parameter Information Management Method, Light Source Parameter Information Management Apparatus, and Computer Readable Medium
Gigaphoton Inc.
0 cites
US123009622025
Laser Device and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US122376402025
Line Narrowing Device and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US122164092025
Exposure System, Laser Control Parameter Production Method, and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US121971322025
Exposure System and Method for Manufacturing Electronic Devices
Gigaphoton Inc.
0 cites
US121600852024
Laser System and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US121115772024
Line Narrowing Device, Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US121054252024
Exposure Method, Exposure System, and Method for Manufacturing Electronic Devices
Gigaphoton Inc.
0 cites
US120768152024
Laser Processing Apparatus and Method for Processing Workpiece
Gigaphoton Inc.
0 cites
US120725072024
Laser Radiation System
Kyushu University, National University Corporation
0 cites
US120385672024
Pulse Width Expansion Apparatus and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US118268522023
Laser Processing Apparatus, Laser Processing System, and Laser Processing Method
Gigaphoton Inc.
0 cites
US118223242023
Machine Learning Method, Consumable Management Apparatus, and Computer Readable Medium
Gigaphoton Inc.
0 cites
US118046972023
Laser System and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US117683622023
Laser Radiation System and Method for Manufacturing Electronic Device
Gigaphoton Inc.
0 cites
US117645412023
Laser System and Method for Manufacturing Electronic Device
Gigaphoton Inc.
0 cites
US117106602023
Laser Irradiation Method and Laser Irradiation System
KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION
0 cites
US116145722023
Mirror for Extreme Ultraviolet Light and Extreme Ultraviolet Light Generating Apparatus
Gigaphoton Inc.
0 cites
US116044162023
Laser Processing Method and Laser Processing System
Gigaphoton Inc.
0 cites