Patents/Inventors

Osamu Osawa

TokyoJP0 patents

2 Patents

US124812192025
Illumination Optical System, Exposure Apparatus, Irradiation Method, and Component Manufacturing Method
Ushio Denki Kabushiki Kaisha
0 cites
US124812202025
Lighting Optical System and Exposure Apparatus
USHIO DENKI KABUSHIKI KAISHA
0 cites