7 Patents
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- US124865722025Mechatronic Spatial Atomic Layer Deposition System with Closed-loop Feedback Control of Parallelism and Component Alignment
THE REGENTS OF THE UNIVERSITY OF MICHIGAN
0 cites - US124431752025Eco-efficiency (sustainability) Dashboard for Semiconductor Manufacturing
Applied Materials, Inc.
0 cites - US123262822025Cooling Flow in Substrate Processing According to Predicted Cooling Parameters
Applied Materials, Inc.
0 cites - US122289052025Eco-efficiency Monitoring and Exploration Platform for Semiconductor Manufacturing
Applied Materials, Inc.
0 cites - US120011972024Eco-efficiency (sustainability) Dashboard for Semiconductor Manufacturing
Applied Materials, Inc.
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