Olivier Christian Maurice Lugier

2 Patents

• US123994282025

  Method and Apparatus for Forming a Patterned Layer of Material

  ASML NETHERLANDS B.V.

  0 cites
• US118079372023

  Method and Apparatus for Forming a Patterned Layer of Carbon, Method of Forming a Patterned Layer of Material

  ASML Netherlands B.V.

  0 cites