Patents/Inventors

Oliver Jaeckel

JenaDE1 patent

2 Patents

US121352112024
Device for Measuring a Substrate and Method for Correcting Cyclic Error Components of an Interferometer
Carl Zeiss SMT GmbH
0 cites
US118801452024
Method for Measuring a Substrate for Semiconductor Lithography
Carl Zeiss SMT GmbH
0 cites