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Inventors
Olger Victor Zwier
Eindhoven
NL
4 patents
5 Patents
US12276921
2025
Substrate Comprising a Target Arrangement, and Associated at Least One Patterning Device, Lithographic Method and Metrology Method
ASML Netherlands B.V.
0 cites
US12242203
2025
Target for Measuring a Parameter of a Lithographic Process
ASML Netherlands B.V.
0 cites
US12019377
2024
Target for Measuring a Parameter of a Lithographic Process
ASML Netherlands B.V.
0 cites
US12013647
2024
Metrology Method
ASML NETHERLANDS B.V.
0 cites
US11982946
2024
Metrology Targets
ASML HOLDING N.V.
0 cites