Patents/Inventors

Oleksandr Mikhnenko

San Diego, CAUS2 patents

3 Patents

US125000692025
Method of Mounting Wires to Substrate Support Ceramic
LAM RESEARCH CORPORATION
0 cites
US124445702025
Electrostatic Chuck Heater Resistance Measurement to Approximate Temperature
Lam Research Corporation
0 cites
US121424642024
In Situ Real-time Sensing and Compensation of Non-uniformities in Substrate Processing Systems
LAM RESEARCH CORPORATION
0 cites