Patents/Inventors

Noritaka Ashizawa

TokyoJP1 patent

2 Patents

US123994372025
Debris Mitigation Device and Light Source Apparatus Including the Same
Ushio Denki Kabushiki Kaisha
0 cites
US116315792023
Extreme Ultraviolet Light Source Apparatus and Plasma Position Adjusting Method
USHIO DENKI KABUSHIKI KAISHA
0 cites