19 Patents
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- US122857862025Substrate Processing Apparatus, Purge Gas Control Method, and Vacuum Transfer Chamber Cleaning Method
TOKYO ELECTRON LIMITED
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- US121257382024Storage Module, Substrate Processing System, and Method of Transferring Consumable Member
TOKYO ELECTRON LIMITED
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- US118625062024Substrate Processing System, Vacuum Substrate Transfer Module, and Substrate Transfer Method
TOKYO ELECTRON LIMITED
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- US117421882023Substrate Processing Method, Pressure Control Apparatus and Substrate Processing System
Tokyo Electron Limited
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- US116441212023Gas Inspection Method, Substrate Processing Method, and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites - US115857172023Method for Calibrating Plurality of Chamber Pressure Sensors and Substrate Processing System
Tokyo Electron Limited
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