Norihide Sagara

2 Patents

• US122437582025

  Monitoring System for a Sealing Apparatus Having a Substrate Treatment Apparatus in a Housing Utilizing a Laser Sensor Installed in a Space Between the Housing and the Substrate Treatment Apparatus and That Scans a Detection Region Therein

  Tokyo Electron Limited

  0 cites
• US115717062023

  Droplet Ejecting Apparatus Having Carriage Marks, Droplet Ejecting Method, and Computer Storage Medium

  TOKYO ELECTRON LIMITED

  0 cites