Patents/Inventors

Noriaki Okabe

TokyoJP3 patents

3 Patents

US125753522026
Etching Method and Etching Apparatus
TOKYO ELECTRON LIMITED
0 cites
US122116922025
Wafer Processing Method
Tokyo Electron Limited
0 cites
US116948722023
Pattern Enhancement Using a Gas Cluster Ion Beam
TEL Manufacturing And Engineering Of America, Inc.
0 cites