5 Patents
- US124566012025Charged Particle Beam Writing Method, Charged Particle Beam Writing Apparatus, and Computer-readable Recording Medium
Nuflare Technology, Inc.
0 cites - US119617082024Charged Particle Beam Writing Apparatus, Charged Particle Beam Writing Method, and a Non-transitory Computer-readable Storage Medium
Nuflare Technology, Inc.
0 cites - US118043612023Charged Particle Beam Writing Method, Charged Particle Beam Writing Apparatus, and Computer-readable Recording Medium
Nuflare Technology, Inc.
0 cites - US117893722023Writing Data Generating Method and Multi Charged Particle Beam Writing Apparatus
Nuflare Technology, Inc.
0 cites - US117748602023Writing Data Generating Method, Multi Charged Particle Beam Writing Apparatus, Pattern Inspecting Apparatus, and Computer-readable Recording Medium
Nuflare Technology, Inc.
0 cites