Patents/Inventors

Noriaki Fukiage

YamanashiJP2 patents

3 Patents

US120778552024
Cleaning Method and Film Deposition Apparatus
Tokyo Electron Limited
0 cites
US119707682024
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117252762023
Plasma Purge Method
Tokyo Electron Limited
0 cites