Patents/Inventors

Nobuya Miyoshi

TokyoJP2 patents

3 Patents

US120515742024
Wafer Processing Method and Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US119159512024
Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US115574632023
Vacuum Processing Apparatus
Hitachi High-tech Corporation
0 cites