Patents/Inventors

Nobutoshi Terasawa

SapporoJP2 patents

3 Patents

US124380552025
Abnormality Detection Method and Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124114792025
Method and Apparatus for Determining Cause of Abnormality in a Semiconductor Manufacturing Chamber
TOKYO ELECTRON LIMITED
0 cites
US115674852023
Substrate Processing System and Method for Monitoring Process Data
TOKYO ELECTRON LIMITED
0 cites