Patents/Inventors

Nobutake Kabuki

NirasakiJP10 patents

4 Patents

US126221872026
Substrate Processing Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US125348032026
Film Forming Method
Tokyo Electron Limited
0 cites
US125385042026
Film Formation Method
Tokyo Electron Limited
0 cites
US123519052025
Film Forming Method and Film Forming Apparatus
Tokyo Electron Limited
0 cites