Patents/Inventors

Nobutaka Sasaki

MiyagiJP7 patents

8 Patents

US124697382025
Substrate Support, Plasma Processing Apparatus, and Ring Replacement Method
TOKYO ELECTRON LIMITED
0 cites
US123548492025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123082212025
Substrate Processing System and Method for Installing Edge Ring
Tokyo Electron Limited
0 cites
US122610282025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121911192025
Substrate Processing Apparatus and Gas Switching Method for Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121658542024
Substrate Support and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121658932024
Substrate Processing System and Transfer Method
Tokyo Electron Limited
0 cites
US120273462024
Substrate Processing Apparatus and Method of Driving Relay Member
TOKYO ELECTRON LIMITED
0 cites