Patents/Inventors

Nobuhiro Ogata

KumamotoJP6 patents

7 Patents

US124244592025
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED.
0 cites
US121486322024
Substrate Processing Apparatus and Cleaning Method of Mist Guard
TOKYO ELECTRON LIMITED
0 cites
US120516052024
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120076922024
Nozzle, Substrate Processing Apparatus, and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US118802132024
Substrate Liquid Processing Apparatus and Substrate Liquid Processing Method
Tokyo Electron Limited
0 cites
US117127102023
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US115748272023
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites