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Inventors
Nobuhiro Obara
Tokyo
JP
3 patents
4 Patents
US12422377
2025
Defect Inspection Apparatus and Defect Inspection Method
Hitachi High-tech Corporation
0 cites
US12345661
2025
Defect Inspection Apparatus and Defect Inspection Method
Hitachi High-tech Corporation
0 cites
US12235223
2025
Method for Defect Inspection, System, and Computer-readable Medium
Hitachi High-tech Corporation
0 cites
US12044627
2024
Defect Inspection Device and Defect Inspection Method
Hitachi High-tech Corporation
0 cites