Patents/Inventors

Nobuhiko Yamamoto

YamanashiJP2 patents

3 Patents

US122437182025
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US120464532024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119674852024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites