Patents/Inventors

Nobuaki Shindo

MiyagiJP2 patents

3 Patents

US118878242024
Method of Cleaning Plasma Processing Apparatus and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117053092023
Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US115574982023
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites