3 Patents
- US123157572025Stacked Structure and Semiconductor Manufacturing Apparatus Member
NGK INSULATORS, Ltd.
0 cites - US118456972023Composite Sintered Body, Semiconductor Manufacturing Apparatus Member, and Method of Manufacturing Composite Sintered Body
NGK INSULATORS, Ltd.
0 cites - US115488292023Dense Composite Material, Method for Producing the Same, Joined Body, and Member for Semiconductor Manufacturing Device
NGK Insulators, Ltd.
0 cites