Patents/Inventors

Niraj Rana

West Linn, ORUS11 patents

3 Patents

US126010572026
Soaking and ESC Clamping Sequence for High Bow Substrates
Lam Research Corporation
0 cites
US125657012026
Undercoating Coverage and Resistance Control for ESCS of Substrate Processing Systems
Lam Research Corporation
0 cites
US123409922025
Detection and Location of Anomalous Plasma Events in Fabrication Chambers
Lam Research Corporation
0 cites