4 Patents
- 0 cites
- US122701042025Substrate with Fluorinated Yttrium Coatings, and Methods of Preparing and Using the Substrates
ENTEGRIS, Inc.
0 cites - US120847782024Coatings for Enhancement of Properties and Performance of Substrate Articles and Apparatus
ENTEGRIS, Inc.
0 cites - US120183822024Coatings for Enhancement of Properties and Performance of Substrate Articles and Apparatus
ENTEGRIS, Inc.
0 cites